ETIT Reinraum

Plasma asher R3T Muegg STP 2020

Standort: S3|06 122

  • Polymer asher
  • for removing SU8 and BCB
  • 5 places for 6" substratesAvailable Gas: O2, N2, CF4
  • HF Power: 3000 W
  • 2,45 GHz

https://www.tuinfra.tu-darmstadt.de/