Bestec Co-Sputter Deposition System

  • Ultra-high vacuum system
  • 8 magnetron sources 2“ (co-deposition configuration)
  • 1 magnetron source 3” (centered)
  • DC and RF sputtering
  • sample heater (up to 1000°C)
  • high-resolution power supplies
  • Ar, N2, O2
  • sample rotation
  • load lock with 6x magazine
  • part of a PLD / MBE cluster system

Magneto-Optical Kerr Effect Magnetometer

  • Longitudinal (L-MOKE) and polar (P-MOKE) configurations
  • low-noise design with DC detection
  • 60mm core electromagnet
  • up to 2T in polar configuration

Vacuum Furnace

  • high vacuum design
  • heater for 9x samples with 10x10mm²
  • up to 600°C
  • permanent magnet with 600mT for field cooling

Sputter deposition and ion beam etching

Sputter deposition

  • 4x magnetron sources 2"
  • DC and RF sputter deposition
  • co-deposition with two sources
  • sample rotation
  • sample magazine
  • oblique deposition between 0° and 90°
  • Ar, N2, O2

Etching

  • RF ion source
  • three-grid accelerator system
  • 400 eV ion beam energy (default, up to 1000 eV available)
  • beam current typ. 10mA
  • 25mm beam diameter
  • sample rotation and inclination

Ferromagnetic Resonance (FMR)

Broadband FMR

  • 0.1 to 30 GHz source (DS Instruments SG30000PRO) with 15dBm
  • 80mm core magnet (up to 2T in perpendicular configuration)
  • grounded coplanar waveguide design
  • detection with Schottky diode
  • field modulation

Spin-Torque FMR

  • 0.1 to 30 GHz source (DS Instruments SG30000PRO) with 15dBm
  • 50mm core magnet (up to 0.5T)
  • FormFactor ACP40 GSG 150µm pitch microprobe
  • Keithley 2450 sourcemeter for DC detection
  • field modulation and lock-in detection of mixing voltage

Kerr microscope and wafer prober

Kerr microscope

  • Zeiss Axioscope Vario
  • polarizer / analyzer upgrade
  • 5x and 20x Epiplan Neofluar POL lenses
  • The Imaging Source industrial camera
  • vector magnet system with in-plane (200mT) and out-of-plane field (100mT)
  • 3D Hall sensor integrated into the sample stage

Wafer prober

  • tungsten tips with 5µm radius
  • compact micropositioners
  • Keithley 2450 source meter for general purpose measurements
  • Zurich Instruments MFLI lock-in amplifier
  • Keithley DMM6500 multimeters
  • Agilent 33500 waveform generator
  • GMR, TMR, Hall effect, current-induced magnetization switching, etc…