ETIT Clean Room

Desktop SEM – Phenom Pro x

Location S3|06 122

  • Desktop SEM with EDS
  • Sample size 25 mm
  • Resolution <6 nm
  • 5kV 10 kV 15 kV
  • Navigation camera
  • 350.000x Mangnification
  • 160x optical camera Magnification

https://www.tuinfra.tu-darmstadt.de/