ETIT Reinraum

Evaporator Balzers BAK 600 (PVD)

Standort: S3|06 122

  • Nickel and Copper Galvanic for 4 inch wafers
  • Nickelsulfamat and Acidic Copper bathes
  • 1 µm/min @ 5A/dm²
  • Current source up to 10 A
  • Puls Plating

https://www.tuinfra.tu-darmstadt.de/