Evaporator Balzers BAK 600 (PVD)
Location S3|06 122
- Nickel and Copper Galvanic for 4 inch wafers
- Nickelsulfamat and Acidic Copper bathes
- 1 µm/min @ 5A/dm²
- Current source up to 10 A
- Puls Plating
Institute of Microwave Engineering and Photonics
Location S3|06 122